Defect And Critical Dimension Analysis Systems And Methods For A Semiconductor Lithographic Process

ABSTRACT

Apparatus and method evaluate a wafer fabrication process for forming patterns on a wafer based upon design data. Within a recipe database, two or more inspection regions are defined on the wafer for analysis. Patterns within each of the inspection regions are automatically selected based upon tendency for measurement variation resulting from variation in the fabrication process. For each inspection region, at least one image of patterns within the inspection region is captured, a reference pattern, represented by one or both of (a) one or more line segments and (b) one or more curves, is automatically generated from the design data. An inspection unit detects edges within each of the images and registers the image with the reference pattern. One or more measurements are determined from the edges for each of the selected patterns and are processed within a statistical analyzer to form statistical information associated with the fabrication process.

BACKGROUND

Manufacture of semiconductor wafers uses a complex and preciselithographic process. Quality control and analysis of the lithographicprocess through each stage of wafer manufacture is critical to ensurethe quality and reliability of the final product. Inconsistencies withinthe lithographic process are undesirable and early detection andcorrection of these inconsistencies saves a significant amount of timeand expense for the manufacturer. For example, if problems withlithographic line and space definition can be identified after resistdevelopment and before etching, wafers can be reworked. Similarly, iflithographic issues can be identified soon after etching, processadjustments can be made many weeks sooner than would be required ifwafer completion and electrical testing is required before makingadjustments.

Typically, wafers are viewed and measured using a criticaldimension-scanning electron microscope (CD-SEM) technique, wherein anelectron microscope is used to image pattern features within a smallportion of a wafer and measurements of the pattern features may be made.However, the CD-SEM technique images only a small portion (e.g., lessthan 1 μm square at a time without distortion) of the wafer, andrequires many days/weeks of continuous imaging and analysis to evaluatethe entire wafer. Thus, manufacturers typically image a few samplepoints of a wafer using CD-SEM to evaluate the wafer as a whole. Suchlimited sampling, however, may not be representative of the wafer as awhole, since only a small fraction of formed patterns is actuallyevaluated. Further, CD-SEM typically makes a single critical dimension(CD) measurement of an imaged pattern, which may give skewed resultsbecause of localized process variation across a wafer. That is, the CDmeasurement made by CD-SEM may not be particularly representative of thewafer as a whole because of the localized process variation.

In the view of measurement accuracy of CD-SEM devices, errors in linewidth measurements of a pattern are near to an allowable error ofcontrol values of process conditions. It is necessary to improveaccuracy of the measurement of the line width of the pattern by using anaverage of measurements of line widths of patterns.

SUMMARY OF THE INVENTION

In an embodiment, a method evaluates a wafer fabrication process forforming patterns on a wafer based upon design data. Within a recipedatabase, two or more inspection regions are defined on the wafer foranalysis. Patterns within each of the inspection regions areautomatically selected based upon tendency for measurement variationresulting from variation in the fabrication process. For each of theinspection regions, at least one image of patterns within the inspectionregion is captured using an imaging device. A reference pattern for eachof the inspection regions is automatically generated from the designdata and is represented by one or both of (a) one or more line segmentsand (b) one or more curves. An inspection unit detects edges within eachof the images and registers the image with the reference pattern. One ormore measurements are determined from the edges for each of the selectedpatterns and are processed within a statistical analyzer to formstatistical information associated with the fabrication process. Thestatistical information is output as an evaluation of the fabricationprocess.

In another embodiment, an inspection apparatus evaluates a fabricationprocess used to form patterns on a wafer. The inspection apparatusincludes a scanning electron imager for capturing at least one image ofeach of a plurality of selected inspection regions on the wafer. Areference pattern generator of the inspection apparatus generates areference pattern for each of the selected inspection regions based upondesign data of the patterns formed within the inspection regions. Thereference pattern is represented by one or both of (a) one or more linesegments and (b) one or more curves. An inspection unit of theinspection apparatus selects the plurality of inspection regions,automatically selects at least one pattern within each inspection regionbased upon tendency for measurement variation resulting from variationin the fabrication process, detects edges within the at least one image,and compares certain of the edges with associated line segments andcurves of the reference pattern to generate one or more measurements. Astatistical analyzer of the inspection apparatus processes themeasurements to form statistical information associated with thefabrication process, and an output unit of the inspection apparatusoutputs the statistical information as an evaluation of the fabricationprocess.

In another embodiment, an inspection apparatus evaluates a fabricationprocess used to fabricate a wafer. The inspection apparatus includes animager for capturing at least one image of each of a plurality ofinspection regions on the wafer and a reference pattern generator forgenerating a reference pattern for each of the inspection regions fromdesign data of the wafer. The reference pattern is formed of one or bothof (a) one or more line segments and (b) one or more curves. Aninspection unit of the inspection apparatus detects edges within each ofthe images, automatically selects patterns within each of the inspectionregions based upon tendency for measurement variation resulting fromvariation in the fabrication process, and compares, for the selectedpatterns, certain of the edges with associated line segments and curvesof the reference pattern to determine one or both of (a) a maximum emptycircle within the boundary of the certain edges and (b) a smallestenclosing rectangle that includes the certain edges. A statisticalanalyzer of the inspection apparatus determines one or moremodifications to parameters of the fabrication process based upon thestatistical information.

In another embodiment, an inspection apparatus evaluates defects inpatterns fabricated on a wafer by a fabrication process. The inspectionapparatus includes an imager for capturing at least one image of each ofat least one inspection region on the wafer and a reference patterngenerator for generating a reference pattern for each of the inspectionregions from design data of the patterns, the reference pattern beingformed of one or both of (a) one or more line segments and (b) one ormore curves. An inspection unit of the inspection apparatus detectsedges within the image, compares certain of the edges with associatedline segments and curves of the reference pattern to determine thedefects, applies, within the design data and centered on the location ofeach of the defects, a windowing region to select a windowed patternassociated with the defect, compares, for each of the defects, thewindowed pattern associated with the defect against each windowedpattern associated with the other defects to determine a differencevalue for each pair of defects, and groups defects having differencevalues less than a predefined difference value threshold. An output unitof the inspection apparatus outputs information of the grouped defects.

In another embodiment, a method evaluates a fabrication process of awafer. The method determines measurements WEi of patterns formed on thewafer prior to the fabrication process, measurements WRi of the patternsafter the fabrication process, and then subtracts measurements WEi frommeasurements WRi to form difference measurements. The method thenstatistically analyzes the difference measurements to evaluate thefabrication process.

In another embodiment, a method evaluates a fabrication process of awafer by determining measurements WAi of the patterns formed on thewafer after the fabrication process and determining measurements WGi ofpatterns formed on a known good wafer by a substantially similar processto the fabrication process. The method then subtracts measurements WAifrom measurements WGi to form difference measurements and statisticallyanalyzes the difference measurements to evaluate the fabricationprocess.

BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 shows one exemplary defect analysis system for a semiconductorlithographic process, in an embodiment.

FIG. 2 shows the wafer of FIG. 1 having twenty-nine shots, five of whicheach have twenty-one inspection regions.

FIG. 3 is a schematic showing exemplary detail of the reference patternof FIG. 1 as generated for the inspection region.

FIG. 4 shows exemplary width and length measurements of one gate of thereference pattern of FIG. 3.

FIG. 5A graphically illustrates processing of pattern measurements offive inspection regions in each of five shots of the wafer of FIG. 1 toproduce a statistic indicative of overall fabrication process quality ofthe wafer.

FIG. 5B graphically illustrates processing of pattern measurements forfive inspection regions in each of five shots of the wafer of FIG. 1 toproduce statistics indicative of fabrication process quality of eachshot.

FIG. 5C graphically illustrates processing of pattern measurements forfive inspection regions within one shot of the wafer of FIG. 1 toproduce statistics indicative of fabrication process quality across theshot.

FIG. 6 and FIG. 7 are schematic diagrams showing exemplary portion ofthe design data of FIG. 1 that show a pattern and its spacing to twoadjacent patterns.

FIG. 8 graphically shows two exemplary layers in a portion of the designdata of FIG. 1.

FIG. 9 shows one exemplary inspection region containing test patternsformed on a wafer with a defined pattern spacing.

FIG. 10 is a normal probability plot of a distribution of measured linewidths for the test patterns of FIG. 9 formed for each of the sevenpattern spacing values 120 nm, 110 nm, 100 nm, 90 nm, 80 nm, 70 nm, and60 nm.

FIG. 11 shows a graph plotting line width error against designed spacewidth for each test region having designed pattern spacing of 60 nm, 70nm, 80 nm, 90 nm, 100 nm, 110 nm, and 120 nm.

FIG. 12 shows one exemplary wafer having a plurality of shots fabricatedusing substantially the same fabrication parameters (conditions).

FIG. 13 is a graph illustrating poor or no correlation betweenmeasurements of corresponding patterns within an upper shot and a centershot of the wafer of FIG. 12.

FIG. 14 shows a distribution of average line width measurements ofpatterns within each shot of a test wafer.

FIG. 15 shows distribution of standard deviation of line widthmeasurements of patterns formed within each shot of the test wafer ofFIG. 14.

FIG. 16 is a flowchart illustrating one exemplary process for evaluatingfabrication process condition.

FIG. 17 shows one exemplary process for evaluating a fabrication processby differencing and statistically analyzing line width measurements fora known good quality patterns and patterns produced by substantially thesame fabrication process at a later time.

FIG. 18 is a schematic illustrating an exemplary contact hole designdata and an exemplary set of detected edges that form a contour for thefabricated contact hole.

FIG. 19 shows a smallest enclosing rectangle that can be formed aroundthe contour of FIG. 18 and a maximum empty circle that can be formedwithin the contour.

FIG. 20A schematically illustrates a cross section A-A of the contacthole of FIG. 18 where a CVD process deposits a film having a thicknessless than the radius of maximum empty circle of FIG. 19.

FIG. 20B schematically illustrates a cross section A-A of the contacthole of FIG. 18 where a CVD process deposits a film having a thicknessgreater than the radius of the maximum empty circle of FIG. 190,resulting in an inferior quality contact hole.

FIGS. 21A and 21B shows identified first and second defects, around eachof which a first and second design data windowing region is centered andused to isolate first and second design data patterns, respectively.

FIG. 22 shows the pattern of FIG. 21B overlaid upon the pattern of FIG.21A such that vertices of the patterns coincides to measure a differencevalue that is indicative of similarity in the patterns.

FIG. 23 shows an exemplary table of difference values for fiveidentified defects.

FIG. 24 schematically illustrates a defect analysis system for asemiconductor lithographic process, in an embodiment.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

FIG. 1 shows one exemplary defect analysis system 100 for asemiconductor lithographic process 120. System 100 includes an electronimage acquiring device (EIAD) 102, a reference pattern generator 106, aninspection unit 108, a statistical analyzer 112 and an output unit 114.System 100 may also include a graphical user interface (GUI) 116 thatallows a user to interact with system 100 and view output fromstatistical analyzer 112. System 100 may include at least part of thefunctionality of the pattern inspection apparatus shown in FIG. 15 ofU.S. application Ser. No. 11/987,766 (hereinafter the '766 Application),filed Dec. 4, 2007, incorporated herein by reference. For example, EIAD102 may represent image generation device 7 shown in FIGS. 1, 15, 16,and 17 of the '766 Application; reference pattern generator 106 mayrepresent reference pattern generation unit 11 shown in FIGS. 16 and 17of the '766 Application; classification database 110 may representdefect class reference database 23 shown in FIGS. 16 and 17 of the '766Application; and design database 104 may represents fundamental database21 shown in FIGS. 16 and 17 of the '766 Application. Terms used withinthis application may represent similar terms within the '766Application. For example, the term ‘pattern,’ as used herein, may bereferred to as ‘pattern to-be-inspected’ within the '766 Application.

Lithographic process 120 fabricates, under control of at least onecontrol input 128 of a process controller 118, a plurality of shots 123,or patterns, on a wafer 122 based upon design data 126 of designdatabase 104. Design data 126 represents computer aided design (CAD)data for producing at least one die within each shot 123 of wafer 122.Control input 128 may represent control of any one or more of dose,etching, and exposure of lithographic process 120, but may representother control parameters of lithographic process 120 without departingfrom the scope hereof. For example, control input 128 may provideadjustments to one or more optical proximity correction (OPC) rules oflithographic process 120.

Wafer 122 is analyzed by system 100 after each of several sub-processsteps (e.g., masking, etching) of lithographic process 120 such thatsystem 100 provides input to process controller 118 to allow controlinputs 128 to be selected for each sub-process of lithographic process120 performed on wafer 122 (and/or subsequently processed wafers).

Under control of inspection unit 108, EIAD 102 acquires at least oneimage 103 of at least one inspection region 124 of wafer 122 using ahigh resolution high speed secondary electron acquisition capability.This high speed secondary electron acquisition capability includes ascan generator to acquire large area images using electron optics thateliminate field distortion over the wide scanning area. For example,EIAD 102 may capture image 103 at a resolution of 3 nm per pixel whereinspection region 124 is 50 micrometers (μm) square. In comparison,although prior art CD-SEM may capture images at higher resolutions, thearea captured is less than 1 μm square and therefore includes only a fewpatterns (e.g., gates and tracks, including aluminum and/or copperwiring). Image 103 of inspection region 124 may include thousands ofpatterns that are automatically registered and measured by inspectionunit 108. The patterns are registered by detecting edges within image103 and the detected edges are measured to generate measurements 109.Inspection unit 108 determines inspection regions 124 based upon inputfrom a recipe database 130, which may be configured by a user of system100 to identify specific patterns formed on wafer 122 for analysis. Forexample, recipe database 130 may identify particular structures ofscribeline test patterns and other structures having known drawndimensions. Inspection unit 108 may therefore control system 100, basedupon recipe database 130, to automatically capture and process images ofa plurality of inspection regions 124. That is, unlike CD-SEM imagingthat is usually controlled by a human operator, imaging and analysis ofwafer 122 by system 100 is substantially automated and the area imagedand analyzed is significantly greater than possible with the CD-SEM in areasonable amount of time.

Reference pattern generator 106 generates reference pattern 107 fromdesign data 126 for each imaged inspection region 124. Reference pattern107 defines the expected geometry of patterns formed within each imagedinspection region 124 based upon the performed lithographicsub-processes on wafer 122. Reference pattern 107 is formed of one orboth of (a) one or more line segments typically oriented parallel to oneor both axes, and (b) one or more curves. Reference pattern generator106 may anticipate corner rounding and other processing variations todefine reference pattern 107.

Inspection unit 108 automatically registers (i.e., aligns) and comparesdetected edges of image 103 to reference pattern 107 and generatesmeasurements 109. Measurements 109 may represent the difference (bias)between detected edges and the associated reference pattern and may alsorepresent direct measurements of edges detected in image 103. The '766Application describes edge detection and measurement in detail. Furtherdetail of edge detection, reference pattern, and bias measurement, asperformed by system 100, may be found in a paper titled “Introduction ofa die-to-database verification tool for the entire printed geometry of adie: geometry verification system NGR2100 for DFM” by Tadashi Kitamuraet al. [Proc. SPIE, Vol. 5756, 73 (2005); DOI:10.1117/12.599467],hereinafter “DFM paper”, and incorporated herein by reference. Furtherdetails on analysis of optical proximity correction (OPC) features maybe found in a paper titled “Die-to-database verification tool fordetecting CD errors, which are caused by OPC features, by using massgate measurement and layout information” by Tadashi Kitamura et al.[Proc. SPIE, Vol. 6518, 651834 (2007); DOI:10.1117/12.712413],incorporated herein by reference.

Statistical analyzer 112 processes measurements 109 and design data 126to determine statistical data 113 for one or more inspection regions124, and may also utilize a classification database 110 to classify andsort measurements 109 prior to statistical analysis.

Controlling Process Conditions Using Statistics of Line WidthMeasurements

With the traditional CD-SEM method of measuring line widths of a patternformed on a wafer, measurement error can be near allowable error of thecontrol values of the process conditions. Therefore, CD-SEM measurementsare often not appropriate for controlling fabrication processes. To usemeasurements for controlling fabrication processes, it is desirable toimprove the accuracy of the measurements (e.g., line width measurementsof imaged patterns) by averaging measurements of many instances of apattern formed by the fabrication process. It is therefore desirable touse an inspection region that includes multiple instances of the patternsuch that multiple measurements may be made and then averaged.

Inspection regions 124 each contain many instances of the pattern to bemeasured, and many inspection regions 124 are selected for analysis,such that many measurements of the pattern may be made and statisticallyanalyzed. For example, each inspection region 124 has many instances ofthe pattern within each image of inspection region 124. Further, sinceregistration of image 103 (i.e., matching of the imaged patterns toassociated reference pattern 107 generated from design data 126) andmeasurements of patterns therein are performed automatically, multipleinspection regions may be specified (e.g., within recipe database 130)for each of multiple shots 123 on wafer 122.

FIG. 24 schematically illustrates a defect analysis system 2400 for asemiconductor lithographic process. System 2400 includes a main controlunit 2402, EIAD 102, GUI 116 and a printer 2414. Main control unit 2402includes a processor 2404, memory 2406, a storage device 2408 and aninput/output interface 2412. Storage device 2408 may represent any typeof non-volatile storage media, such as any one or more selected from thegroup consisting of a hard drive, an optical drive, and Flash memory.

Processor 2404 may represent one or more processing units and/orprocessing cores that execute at least part of software 2410 withinmemory 2406. Memory 2406 may represent any type of volatile randomaccess memory (RAM) that is accessible by processor 2404. Although shownwithin main control unit 2402, storage device 2408 may be locatedexternal to, and in communication with, main control unit 2402, withoutdeparting from the scope hereof. Input/output interface 2412 providesconnectivity between processor 2404, memory 2406 and/or storage device2408 and one or more of EIAD 102, GUI 116 and printer 2414.

Storage device 2408 stores software 2410 that includes instructions,executable by processor 2404 when loaded at least in part into memory2406, for performing functionality of at least part of each of referencepattern generator 106, inspection unit 108 and statistical analyzer 112.Software 2410 is illustratively shown is dashed outline within memory2406.

Main control unit 2402 may represent a personal computer and/or a servercomputer that is loaded with software 2410 to perform certainfunctionality of system 100, FIG. 1.

FIG. 2 shows wafer 122 of FIG. 1 having twenty-nine shots 123, whereinfive selected shots each have twenty-one inspection regions 124.Inspection regions 124 may be elements of die, or may be elements oftest patterns located in scribelines. Since hundreds of measurements maybe made within each inspection region, statistical analysis of thesemeasurements provide a substantially more accurate representation of thefabrication process of wafer 122 than can be determined from individualmeasurements made by prior art CD-SEM. In the prior art, CD-SEMinspection operators typically make five measurements of a pattern ineach of five shots on a wafer, and these twenty-five measurements areused to indicate quality of the entire wafer. The greater number ofinspection regions, and the greater the number of measurements taken andanalyzed, the greater the quality of the result and the greateropportunity to determine skew of parameters across a wafer as well asmean values and standard deviations.

In a perfect world, measurement of each fabricated pattern within eachshot on the wafer would yield the best result. However, even when fullyautomated, measurement of an entire wafer, although possible, would taketoo long to be of any use. By defining appropriate shots, patterns andinspection regions within recipe database 130, sufficient measurementsmay be taken within a reasonable amount of time to provide good controlof lithographic fabrication processes.

FIG. 3 is a layout diagram showing exemplary detail of reference pattern107 generated for one inspection region 124. Where each shot 123 ofwafer 122 is fabricated to have identical circuitry, reference pattern107 may represent one or more of inspection regions 124, as shown inFIGS. 1 and 2. Reference pattern 107 is shown with two patterned layers302 and 304 that may represent one or more of polysilicon gate andactive N or P type layers formed on wafer 122. Where layers 302 and 304overlap, gate oxides 306 are typically formed on wafer 122.

Within reference pattern 107, a plurality of patterns 308 (e.g., gates)are selected for analysis, as indicated by the dashed oval 310.Selection of patterns 308 may be made automatically based upon the typeof wafer analysis to be performed. Further detail on pattern selectionis provided below.

Line widths of the patterns within each inspection region are determinedas described in section 5.3.1 Method of inspecting gate line width ofthe '766 Application. FIG. 4 shows exemplary width 404 and length 402measurements of pattern 308 of reference pattern 107 formed from layers302 and 304. Based upon reference pattern 107, patterns within image 103are automatically registered and measured based upon detected edges. Agate width is, for example, typically 45 nm, and since inspection region124 covers an area greater than 1 μm², a large number of such gates aretypically fabricated within inspection region 124. Selecting, andmeasuring such a large number of gates is not practically feasiblewithout automatic registration (and optional selection). That is, manualmeasurements of such numbers of gates using prior art CD-SEM would beimpractical.

More specifically, it is necessary to obtain measurements of line widthsof patterns within numerous inspection regions of numerous shotsdistributed over the wafer, as illustrated in FIG. 2. Althoughinspection regions are shown arranged in an even distribution withineach shot, and an even shot selection is shown, inspection regions maybe assigned to areas that are more vulnerable to variation in processconditions, thereby providing greater determination of fabricationprocess performance. For example, previously collected data may indicateareas more vulnerable to process variation, and thereby allow inspectionunit 108 to automatically select inspection regions 124 based uponpreviously detected faults.

FIG. 5A graphically illustrates processing of pattern measurements(e.g., gate width measurements) of five inspection regions 124(1-5) ineach of five shots 123(1-5) of wafer 122 to produce a statistic 502indicative of overall fabrication process quality of wafer 122.Inspection unit 108 determines measurements for each inspection region124(1-5) in each shot 123(1-5) of wafer 122 and statistical analyzer 112processes these measurements to generate measurement statistics 502.Since measurement statistics 502 includes processed measurement datafrom shots 123 across wafer 122, measurement statistics 502 areindicative of overall fabrication process quality of wafer 122.

FIG. 5B graphically illustrates processing of pattern measurements(e.g., gate width measurements) for five inspection regions 124(1-5) ineach of five shots 123(1-5) of wafer 122 to produce statistics 512(1-5),where each statistic 512 is indicative of fabrication process quality ofshots 123(1-5), respectively. That is, for each shot 123(1-5),inspection unit 108 determines measurements for each inspection region124(1-5) and statistical analyzer 112 processes these measurements togenerate statistics 512(1-5), respectively. Each group of statistics512(1-5) may then be compared to determine differences in fabricationprocess quality across wafer 122. Further, statistics 512(1-5) may alsobe compared to overall wafer measurement statistic 502.

FIG. 5C graphically illustrates processing of pattern measurements(e.g., gate width measurements) for five inspection regions 124(1-5)within shot 123 of wafer 122 to produce statistics 522(1-5), where eachstatistic 522 is indicative of fabrication process quality across shot123. That is, for shot 123, inspection unit 108 determines measurementsfor each inspection region 124(1-5) and statistical analyzer 112processes these measurements to generate statistic 522(1-5). Eachstatistic 522(1-5) may then be compared to determine differences and/orvariation in fabrication process quality across shot 123. Further,statistics 522(1-5) may also be compared to statistic 512 associatedwith shot 123.

Where measurements are of line width, tendency in variation of linewidth may be further analyzed to identify variation tendency across thewafer, and/or within each shot. Although five shots 123 are shownselected, more or fewer shots may be selected, without departing fromthe scope hereof. Although five inspection regions 124 are shown withineach selected shot, more or fewer inspection regions may be used withoutdeparting from the scope hereof.

Classification of Measurements Based Upon Design Data Characteristics

A variation may be related to measured line widths of a first set ofpatterns having the same design width. Another variation may be relatedto measured line widths of a second set of patterns having the samedesign width, which is different from the design width of the first setof patterns. Variations in these measured line width may include variouscomponents of independent variations. To assess and control thefabrication processes sufficiently, line width measurements for numerousdifferent design line widths are measured and analyzed. Further, otherpattern characteristics, based upon the associated design data, affectfabricated line widths of the patterns. Thus, classification ofmeasurements may be based upon design data characteristics for one ormore of pattern direction, kinds of pattern, space between patterns,types of adjacent patterns, and density of adjacent patterns. The linewidth measurements are sorted, based upon one or more of the associateddesign data characteristics and then statistically analyzed for trendsin variation of line width.

In an embodiment, measured line widths for patterns associated with arange of design data line widths may be analyzed to determine anevaluation of the fabrication process. For example, a first statisticalanalysis of measured line widths may be made for measurements having anassociated design data line width in the range from 30 nm to 32 nm, asecond statistical analysis may be made for measurements having anassociated design data line width in the range from 32 nm to 34 nm, andso on.

In the prior art, where distributions corresponding to different designline width values are merged, the accuracy of the resulting statisticdeteriorates. To prevent such accuracy deterioration, differencesbetween the measured line widths and the line width defined within theassociated design data are used to form the statistic, thereby allowingstatistics to be combined without deterioration.

Further classification of line width measurements may be based upon adirection of the pattern as defined within the associated design data.Typically, within the design data, horizontal and vertical directionsare used for gates, with diagonal and curved gates often avoided,although other directions may be used in some designs. Measurementsselected for statistical analysis may be based upon one or more definedline directions, including, but not limited to, horizontal, vertical,and directions in multiples of 45 degrees.

Further classification of line width measurement may be based upon anassociated gate type within the design data. For example, where measuredline widths correspond to a gate defined within the design data, theassociated gate type (e.g., P-type and N-type) may be used to furtherclassify the line width measurements prior to statistical analysis. Thegenerated statistics thereby providing insight into fabricationprocesses that may differ in some ways for each gate type.

Further classification of measured line widths may be made bydetermining, from associated design data, a width between the measuredpattern and patterns formed adjacent to the measured pattern.

FIG. 6 is a schematic diagram showing a first portion 600 of design data126 that includes a pattern 602 and its two adjacent patterns 604 and606. Pattern 602 has a defined width 608 and has a defined spacedistance 610 from pattern 604 and a defined space distance 612 frompattern 606. FIG. 7 is a schematic diagram showing a second portion 700of design data 126 that includes a pattern 702 and its two adjacentpatterns 704 and 706. Pattern 702 has a defined width 708 and is spaceda distance 710 from pattern 704 and a distance 712 from pattern 706.Patterns 602, 604, 606, 702, 704 and 706 may represent design data forgates to be formed on a wafer during fabrication of the design data.Prior to statistical analysis of width measurements of patterns 602 and702 fabricated on wafer 122, these width measurements may also beclassified based upon spacing around the pattern (i.e., distances 610,612, and 710, 712, respectively).

In one example of operation, defined width 608 is classified based uponone or more of a sum, an average and a minimum of space distances 610and 612, and defined width 708 is classified based upon one or more of asum, an average and a minimum, of space distances 710 and 712. Bygrouping measured widths based upon these classifications, statisticsmay be generated for ranges of pattern spacing, such that thesestatistics show greater detail for each pattern spacing range, unlikethe prior art where spacing is not taken into account, resulting in lessmeaningful (blurred) statistics. This is of particular significance forwafer fabrication processes, since pattern spacing results insignificant variation in resulting pattern widths. By analyzing patternwidths based upon pattern spacing, greater understanding (and hencecontrol) of fabrication processes is possible. Further, direction ofspaces relative to measured patterns may also be used to classifymeasured widths prior to statistical analysis.

An alternative classification of measured pattern widths may be madebased upon densities of patterns in areas adjacent to the measuredpattern. Pattern density of an area may be determined by the equation:

Pattern Density=Area of Patterns in Neighboring Region/Area ofNeighboring Region

Thus, rather than determining spaces, and space directions around themeasured pattern, the density of patterns around the measured patternmay be used to provide an alternative classification. FIG. 8 graphicallyshows two exemplary layers 804, 806, in a portion 800 of design data126. A width measurement of the pattern associated with first gate 802is classified by evaluating the density of patterns within a neighboringregion 808 surrounding gate 802. Similarly, a pattern density isdetermined for a second gate 822 based upon a neighboring region 828surrounding gate 822. As shown, region 808 has a higher pattern densitythan region 828, such that measured widths of gates 802 and 822 areclassified differently. In one embodiment, ranges of pattern density areused in a similar manner to ranges of the pattern line widths toclassify measured patterns prior to statistical analysis.

Measurements are automatically determined for each inspection region,classified and then analyzed to generate one or more different types ofstatistic. That is, patterns may be automatically selected from designdata 126 based upon classification criteria, such that system 100 mayautomatically image and measure, classify and analyze the patterns togenerate appropriate data for control of fabrication processes. Althoughaveraging is a common statistical analysis used to analyze measurements,other statistics, such as standard deviation, maximum value, and minimumvalue, may be generated. In the prior art, where CD-SEM is used toperform a measurement within each inspection region, the limited numberof measurements inhibits the generation of meaningful statistics. Forexample, using CD-SEM to measure singular values within each of fiveinspection regions within each of five selected shots on a waferprovides only twenty-five measurement values from the wafer, and thusobtained statistical information is of limited value. It is noted thateven this limited quantity of prior art measurements made with theCD-SEM is time consuming.

A variation in any one process condition of the wafer fabrication maycause large variations in an average of line widths measured over thewafer and small variations in a standard deviation of thosemeasurements. On the other hand, a variation in another processcondition of the wafer fabrication may cause small variations in anaverage of line widths measured across the wafer and large variations ina standard deviation of those measurements. Thus, by comparing bothaverage and standard deviation statistics of the measurements, clues tocauses of the variation in the process condition may be identified.

Although the examples shown herein utilize a plurality of inspectionregions located within a plurality of shots on the wafer, a plurality ofinspection regions within a plurality of dies may also be used withoutdeparting from the scope hereof. Also, although the examples hereinutilize a line width of patterns formed on the wafer, other measurementsmay also be used without departing from the scope hereof. For example,any one or more of average line width, space width, and average spacewidth of line-shaped patterns may be used, where, in the above examples,the line width and the space width are transposed. See the '766Application for details of determining measurements from withininspection regions.

To evaluate the effects of pattern spacing on fabrication processes,patterns are formed onto the wafer in a plurality of test regions, wherepattern spacing within each region is one of 120 nm, 110 nm, 100 nm, 90nm, 80 nm, 70 nm, and 60 nm. FIG. 9 shows one exemplary inspectionregion 900 containing patterns 902 formed on the wafer with a spacing906. A width of pattern 902′ is measured within a central part ofinspection region 900, as indicated by square 904. Inspection region 900is substantially square, having an area of 36 μm² (i.e., having sides ofapproximately 6 μm). Patterns 902 have a design width of 70 nm withineach test region. Thus, each inspection region 900 contains between 31and 46 patterns 902.

FIG. 10 is a normal probability plot 1000 of a distribution of measuredline widths (within square 904) for patterns 902′, FIG. 9, formed withininspection region 900 for each of the seven pattern spacing values 120nm, 110 nm, 100 nm, 90 nm, 80 nm, 70 nm, and 60 nm. The horizontal axisof plot 1000 represents the measured line width, and the vertical axisrepresents a standard deviation.

A point 1002 represents a measured width of pattern 902′ withininspection region 900 for the pattern spacing of 120 nm, and plottedpoints extending therefrom represent other pattern width measurementswithin inspection region 900 for the same pattern spacing and having astandard deviation of 0.59 nm.

A point 1004 represents a measured width of pattern 902′ withininspection region 900 for the pattern spacing of 110 nm, and plottedpoints extending therefrom represent other pattern width measurementswithin inspection region 900 for the same pattern spacing and having astandard deviation of 0.61 nm.

A point 1006 represents a measured width of pattern 902′ withininspection region 900 for the pattern spacing of 100 nm, and plottedpoints extending therefrom represent other pattern width measurementswithin inspection region 900 for the same pattern spacing and having astandard deviation of 0.60 nm.

A point 1008 represents a measured width of pattern 902′ withininspection region 900 for the pattern spacing of 90 nm, and plottedpoints extending therefrom represent other pattern width measurementswithin inspection region 900 for the same pattern spacing and having astandard deviation of 0.65 nm.

A point 1010 represents a measured width of pattern 902′ withininspection region 900 for the pattern spacing of 80 nm, and plottedpoints extending therefrom represent other pattern width measurementswithin inspection region 900 for the same pattern spacing and having astandard deviation of 0.75 nm.

A point 1012 represents a measured width of pattern 902′ withininspection region 900 for the pattern spacing of 70 nm, and plottedpoints extending therefrom represent other pattern width measurementswithin inspection region 900 for the same pattern spacing and having astandard deviation of 0.94 nm.

A point 1014 represents a measured width of pattern 902′ withininspection region 900 for the pattern spacing of 60 nm, and plottedpoints extending therefrom represent other pattern width measurementswithin inspection region 900 for the same pattern spacing and having astandard deviation of 1.31 nm.

FIG. 11 shows a graph 1100 plotting line width error against designedspace width for each central part (e.g., square 904, FIG. 9) ofinspection regions (e.g., inspection region 900) for each test regionhaving designed pattern spacing of 60 nm, 70 nm, 80 nm, 90 nm, 100 nm,110 nm, and 120 nm. Of note, the absolute values of differences dispersewithout correlation to the space width, and the errors of the measuredline widths obtained from central parts (e.g., square 904) of inspectionregions 900 are larger than the average of the error values of thedistributions of measurements of line widths for each of the testedpattern spacing values.

FIG. 12 shows one exemplary wafer 1200 having a plurality of shots 1202fabricated using substantially the same fabrication parameters(conditions). Measured line widths of patterns formed within an uppershot 1202U and measured line widths of corresponding patterns formed ina center shot 1202C are compared to show variation across wafer 1200.FIG. 13 is a graph 1300 illustrating poor or no correlation betweenmeasurements of corresponding patterns within upper shot 1202U andcenter shot 1202C. The horizontal axis represents a line widthmeasurement of a set of patterns in the center shot 1202C and thevertical axis represents a line width measurement of the same set ofpatterns (in the same position) within upper shot 1202U, and plotted asa diamond. The patterns formed within each shot 1202, and used in themeasurements plotted in FIG. 13, have a design width of 70 nm and adesign spacing of 60 nm. Since there is poor or no correlation betweenmeasurements of corresponding sets of patterns within upper shot 1202Uand center shot 1202C, standard deviation of the distribution is large,as seen in FIG. 13. The fabrication quality of the formed patternswithin upper shot 1202U and center shot 1202C cannot be adequatelyevaluated through line width measurement and analysis of correspondingpatterns. On the contrary, a difference of average line widthmeasurements of these patterns is drastically smaller than eachdifference in the corresponding line width measurements. Thus, theaverage line width measurements are more suitable to assess and controlthe fabrication processes than the measurements of corresponding sets ofpatterns.

FIG. 14 shows a distribution of average line width measurements ofpatterns within each shot of a test wafer 1400. FIG. 15 showsdistribution of standard deviation of line width measurements ofpatterns formed within each shot of test wafer 1400. Test wafer 1400 isfabricated with a plurality of shots, where focus is varied in avertical direction for each shot, and dose is varied in a horizontaldirection for each shot. Thus, each fabricated shot has differing focusand dose conditions. The patterns formed within each shot haveconsistent design line width and design spacing. FIG. 14 and FIG. 15 arederived from the same line width measurements of corresponding patternswithin each shot on the same wafer. As shown in FIG. 14, the average ofline width measurements of a shot 1402A is not particularly differentfrom the average of line width measurements of a shot 1402B. However, asshown in FIG. 15, there is a clear difference in the standard deviationof the line width measurements between shots 1402A and 1402B. Thus,where an evaluation of fabrication process conditions is performed usingonly average values of measured line widths within multiple shots acrossa wafer, results may not indicate process anomalies, resulting in anundetected inferior semiconductor device. On the other hand, anevaluation using a standard deviation of the line width measurementvalues would clearly indicate the inferior process conditions.

Accordingly, as shown in FIGS. 14 and 15, by measuring line widths ofpatterns formed within shots on a wafer, an evaluation of the waferfabrication process may be statistically determined. System 100, FIG. 1,automatically registers inspection regions (e.g., inspection regions124, FIGS. 1 and 2, and inspection regions 900, FIG. 9), where eachinspection region has an area greater or equal to 1 μm². Registration ofan inspection region requires locating the region on the wafer,capturing at least one image of that area of the wafer to form an imageof the inspection region and then aligning the captured features in theimage with associated features in reference geometry generated fromassociated design data. Automatic registration of each inspection regionis necessary since one or more inspection regions are registered withinone or more shots of a wafer, and therefore, the number of inspectionregions to be registered may be large, wherein manual registration wouldrequire an inordinate amount of time and make measurement and analysisimpractical.

The average of a plurality of measurements is made within eachinspection region, and results in a more accurate representation ofpattern line width as compared to single measurements (as typicallyperformed manually using CD-SEM). The average of the line widthmeasurement allows process conditions to be controlled more accurately,and cause of process condition variation may be further identifiedthrough statistical analysis (e.g., standard deviation, maximum, andminimum) of the measured line widths.

In particular, the inspection regions may be automatically selected forshots across the wafer such that variation in process conditions acrossthe wafer may be determined upon analysis of measurements made withineach inspection region, wherein statistical analysis of the measurementsmay indicate unwanted process variation across the wafer.

Line width measurements may be classified and/or sorted prior tostatistical analysis to isolate statistical variation for differentprocess conditions. Thus, variation within the process conditions may beidentified through statistical analysis of the classified and/or sortedmeasurement values.

Method of Controlling Variations in Individual Line Widths of Patterns

Using the above systems and methods, during fabrication of a wafer,statistics may be obtained from line width measurements of patterns of asemiconductor device before a fabrication process (e.g., an etchprocess), and statistics may be obtained from measurements of thepatterns of the same semiconductor device after the fabrication process.However, the statistics obtained from the line width measurements madeafter the fabrication process are indicative of performance of thesemiconductor device, and not necessarily of the fabrication process,since variation in gate widths, for example, may have been introduced ina prior fabrication process. In particular, statistics derived from themeasurements made after the fabrication process contain (i) a componentof features existing prior to the fabrication process and (ii) acomponent of the effect of the fabrication process. To improveevaluation of the fabrication process, it is desirable to remove thecomponent of features existing prior to the fabrication process, therebyallowing better control of the fabrication process.

FIG. 16 is a flowchart illustrating one exemplary process 1600 forevaluating fabrication process condition. Process 1600 is for exampleimplemented within one or both of inspection unit 108 and statisticalanalyzer 112 of system 100, FIG. 1.

In step 1602, process 1600 measures line widths W_(Ri) of patternswithin an inspection region of a semiconductor device before afabrication process. In one example of step 1602, inspection unit 108analyzes pattern width measurements 109 generated from at least oneinspection region 124, located on a semiconductor device on wafer 122,prior to an etch process that forms part of lithographic process 120 ofwafer 122. Each measurement 109 is associated with a location i ofW_(Ri).

In step 1604, process 1600 measures line widths W_(Ei) of the patternswithin the inspection region of the same semiconductor device after thefabrication process. In one example of step 1604, inspection unit 108analyzes pattern width measurements 109 generated from the at least oneinspection region 124, located on the semiconductor device on wafer 122,after the etch process. Each measurement 109 is associated with the samelocation i, as in step 1602.

In step 1606, process 1600 calculates the difference W_(Ri)-W_(Ei) forthe measurement sets captured in steps 1602 and 1604. In one example ofstep 1606, inspection unit 108 calculates a difference betweenmeasurements made prior to the fabrication process and measurements madeafter the fabrication process for each location i for the semiconductor.

In step 1608, process 1600 statistically analyzed the differences ofstep 1606 to determine a distribution indicative of the fabricationprocess conditions. In one example of step 1608, statistical analyzer112 processes the determined differences W_(Ri)-W_(Ei) and generatesstatistical data 113 that may be used to evaluate the etch process andthereby adjust control parameters of any subsequent etch process (e.g.,the etch process performed on subsequent wafers).

In particular, by subtracting measurements W_(Ei) after the fabricationprocess from measurements. W_(Ri) prior to the fabrication process, onlyvariation in the distribution resulting from the fabrication process isshown in the generated statistic.

The line width measurements may also be classified and sorted, asdescribed above, prior to the step of differencing, such that onlyselected measurements are differenced and then statistically analyzed.

FIG. 17 shows one exemplary process 1700 for evaluating a fabricationprocess by differencing and statistically analyzing line widthmeasurements for a known good quality patterns and patterns produced bythe same fabrication process at a later time. Process 1700 may beimplemented within one or both of inspection unit 108 and statisticalanalyzer 112 of system 100, FIG. 1.

In step 1702, process 1700 measures line widths W_(Gi) of patterns aftera fabrication process of a semiconductor device of good quality. In oneexample of step 1702, inspection unit 108 generates a set ofmeasurements W_(Gi) within one or more inspection regions 124 after anetch process of a semiconductor device, that is determined (e.g., at alater time after complete processing and testing) to be of good quality.

In step 1704, process 1700 measures line widths W_(Ai) of correspondingpatterns in a second semiconductor device produced by the samefabrication process at a later time. In one example of step 1704, awafer containing the same type of semiconductor device produced by thesame fabrication process is inspected and a set of measurements W_(Ai)are made for patterns corresponding to the patterns of step 1702. Thatis, patterns at the same locations within the second semiconductordevice as the patterns measured in the semiconductor device that isknown to be good.

In step 1706, process 1700 calculates a difference W_(Gi)-W_(Ai) ofmeasured line widths of the same patterns. In one example of step 1706,inspection unit 108 generates a measurement set 111 by subtracting setW_(Ai) of step 1702 from set W_(Gi) of step 1704.

In step 1708, process 1700 statistically analyzes the differences todetermine a distribution indicative of the later fabrication processconditions. In one example of step 1708, statistical analyzer 112processes the differences from step 1706 to generate statistical data113 that indicates variance from the fabrication process of known goodquality. In particular, process 1700 generates statistical informationthat is not based upon variance from design data, but from known goodquality results. For example, where a wide wiring pattern of asemiconductor device is fabricated in a different line width from thatspecified within the design data, the semiconductor may still functioncorrectly. Thus, process 1700 may ignore insignificant variations in thefabrication process from design data, and yet still highlight processcondition variations that result in less than good devices.

Smallest Enclosing Rectangle and Maximum Empty Circle

As described in the '766 Application, isolated patterns may be analyzedfor selected features, such as by determining a diameter, an area, alength of the periphery, a degree of circularity, a moment, and thelike, based upon contours obtained from the image of the feature.However, such analysis is not sufficient where contact holes areselected for inspection and evaluation. Since a contact hole has adifferent shape from a circle (such as an ellipse or a peanut shape),width and height measurements of these contact holes are insufficientfor evaluating fabrication process conditions.

To improve upon this analysis, the obtained contours of contact holesmay be used to determine (a) a maximum diameter of a circle that fitswithin the feature contours (maximum empty circle), and (b) a smallestenclosing rectangle that can contain the feature contours. Themeasurements obtained for the maximum empty circle and the smallestenclosing rectangle may be used for analyzing fabrication processconditions. In the following example, contact hole features are analyzedto evaluate fabrication processes.

FIG. 18 is a schematic illustrating an exemplary contact hole designdata 1802 and an exemplary set of detected edges 1804 that form acontour 1806 for the fabricated contact hole 1800. Contour 1806 is apolygon formed by connecting detected edges 1804 of contact hole 1800,such that contour 1806 has a shape approximately matching the shape ofedges of contact hole 1800. In particular, detected edges 1804 representsecond edges of contact hole 1800 detected from an image (e.g., image103, FIG. 1). FIG. 19 shows a smallest enclosing rectangle 1902 that canbe formed around contour 1806 and a maximum empty circle 1904 that canbe formed within edge contour 1806. Smallest enclosing rectangle 1902 isa rectangle having the smallest area that includes all vertices ofcontour 1806. Maximum empty circle 1904 is a circle with the largestradius that can be formed without including a vertex of contour 1806.Smallest enclosing rectangle 1902 and maximum empty circle 1904 may bedetermined through well known methods of computational geometry.

Where contour 1806 approximates a circle, measurements of smallestenclosing rectangle 1902 and maximum empty circle 1904 have equivalentinformation. However, where contour 1806 cannot be approximated by acircle, as shown in FIGS. 18 and 19, measurements of smallest enclosingrectangle 1902 and maximum empty circle 1904 may be used to betterevaluate fabrication process conditions than simple use of width andheight, since the area of smallest enclosing rectangle 1902 may controlan area of contact hole 1800 more precisely, even if contact hole 1800is inclined.

Further, radius of maximum empty circle 1904 may be used to control afollowing chemical vapor deposition (CVD) process such as may be usedfor metallization. FIG. 20A schematically illustrates a cross sectionA-A of contact hole 1800 where a CVD process deposits a film 2002 havinga thickness less that the radius of maximum empty circle 1904, resultingin an inferior quality contact. FIG. 20B schematically illustrates across section A-A of contact hole 1800 where a CVD process deposits afilm 2004 having a thickness greater than or equal to the radius ofmaximum empty circle 1904. Thus, a CDV process may be controlled bydetermining the maximum empty circle of contact holes prior to filmdeposition.

Determined measurements of smallest enclosing rectangle 1902 and maximumempty circle 1904 may be classified and analyzed in a manner similar tothe above described gate width measurements for evaluating andcontrolling fabrication processes. The use of smallest enclosingrectangle 1902 and maximum empty circle 1904 are of particular use incontrolling fabrication processes where contact hole 1800 does notapproximate a circle, since these determined measurements are of use forcontact holes of any shape and orientation.

Classifying Results Using Similarity of Design Data

The above disclosed methodologies for classifying, sorting and analyzingmeasurements based upon design data do not specifically highlight theeffect of pattern shapes upon fabrication processes. That is, thesemeasurements include defects, abnormal measurements, and so on. Byclassifying the measurements based upon similarities in design data,defects and other abnormal measurements not specifically associated withpattern shapes may be ignored.

In semiconductor lithography and etching, processing of an individualshape may be affected by presence or absence of, and details of, nearbyshapes. For example, contact holes may be more difficult to clear ifthere are large numbers of nearby contacts, possibly due to partialexhaustion of etching plasma in the near neighborhood during etching.Similarly, features having particular shapes, such as U shapes, may bemore prone to particular variations in final width and space thanothers. It can be desirable to identify such problem features and todetermine how strong these nearby-feature and feature-shape effects areon critical dimensions of resulting product.

In an embodiment, a method classifies inspection results based uponsimilarity of associated design data. A difference value indicative of adifference in shape and size of design data patterns is determinedbetween windowed design data for identified features (e.g., identifieddefects in the inspection results). The smaller the determineddifference value, the greater the similarity of the design datapatterns.

FIG. 21A shows an identified first defect 2102, around which a firstdesign data windowing region 2104 is centered and used to isolate firstdesign data pattern 2106 that is associated with first defect 2102.Similarly, FIG. 21B shows an identified second defect 2152, around whicha second design data windowing region 2154 is centered and used toisolate second design data pattern 2156 that is associated with seconddefect 2152. Once isolated, first and second design data patterns 2106and 2156 are processed to determine a difference value indicative of thesimilarity in shape and size of patterns 2106 and 2156.

In one example of the processing of patterns 2106 and 2156 to determinesimilarity, a suitable shift quantity is selected for matching a vertexof pattern 2106 and a vertex of pattern 2156. Distances between sides ofpattern 2106 and pattern 2156 are then determined while pattern 2156 isshifted by each shift quantity recognized to be suitable for matching.

FIG. 22 shows pattern 2156 of FIG. 21B overlaid upon pattern 2106 ofFIG. 21A such that a first vertex of pattern 2106 coincides with a firstvertex of pattern 2156 at location 2202. To determine a similarity, thedistance from a first side of pattern 2106 to each side of pattern 2156is determined and the shortest is selected. This is repeated for othersides of pattern 2106, such that a plurality of shortest distances isdetermined. Similarly, for each side of pattern 2156, a distance to eachside of pattern 2106 is determined and the shortest is selected. In theexample of FIG. 22, the shortest distance between the top and left sidesof pattern 2106 and pattern 2156 is each zero, since the verticescoincide at location 2202; other selected shortest distances 2204 areshown. The largest of these selected shortest distances 2204 is thenused as the difference value that defines the similarity betweenpatterns 2106 and 2156. In an alternate embodiment, instead of selectinga shortest distance, the largest of the average of determined distancesmay be used as the difference value to define the similarity ofpatterns.

In yet another embodiment, a ratio R_(O/A) of an area of a polygonP_(OR) obtained by the summation operation OR of the patterns withinwindowed design data and an area of a polygon P_(AND) obtained by theproduct operation AND of the patterns in the windowed design data may beused as the difference value defining the similarity of the patterns.Other values obtained from polygons P_(OR) and P_(AND) may be used todefine similarity, without departing from the scope hereof.

Furthermore, a value obtained from matching of images converted from thewindowed design data may be used as the distance between the windoweddesign data. However, in the case of using the shortest distance,calculation is fastest because calculation may be discontinued when oneof the shortest distances obtained for any side exceeds an allowabledistance between the windowed design data after matching.

Difference values obtained by one of the above methods for all pairs ofdefects identified for a particular test subject (e.g., wafer 122, orshot 123 thereof) may be stored in a table. FIG. 23 shows an exemplarytable 2300 that contains difference values, located at the crossingpositions, for five identified defects, D₁ through D₅. For example,entry 2302 has a value of 50 and represents the comparison of defects D₃and D₄.

Difference values of table 2300 allow defects to be grouped according tosimilarity of patters associated with the defects. Using a differencevalue threshold of 15, table 2300 results in a first grouping thatincludes defects D₁, D₂ and D₃, and a second grouping that includes D₄and D₅. That is, difference values between defects D₁, D₂ and D₃ areless than 15, and difference values of defects D₄ and D₅ are less than15.

In the current embodiment and examples, design data is used to determinesimilarity between patterns associated with identified defects. Inalternate embodiments, other data may be used to determine similarity ofpatterns associated with defects. For example, mask data correspondingto the design data may be processed to determine pattern similarity, andcontours of a simulation pattern obtained from a lithography simulationmay be used to determine pattern similarity. By classifying and groupingdefects based upon pattern similarity, pattern shapes that areassociated with large groups of defects can be easily identified.

Changes may be made in the above methods and systems without departingfrom the scope hereof. It should thus be noted that the matter containedin the above description or shown in the accompanying drawings should beinterpreted as illustrative and not in a limiting sense. The followingclaims are intended to cover all generic and specific features describedherein, as well as all statements of the scope of the present method andsystem, which, as a matter of language, might be said to falltherebetween.

1. A method of evaluating a wafer fabrication process for forming patterns on a wafer based upon design data, comprising: defining, within a recipe database, two or more inspection regions on the wafer for analysis; automatically selecting patterns within each of the inspection regions based upon tendency for measurement variation resulting from variation in the fabrication process; capturing, for each of the inspection regions, at least one image of patterns within the inspection region using an imaging device; automatically generating, from the design data, a reference pattern for each of the inspection regions, the reference pattern being represented by one or both of (a) one or more line segments and (b) one or more curves; detecting, within an inspection unit, edges within each of the images; registering, within the inspection unit, the image with the reference pattern; determining, from the edges, one or more measurements for each of the selected patterns; processing, within a statistical analyzer, the measurements to form statistical information associated with the fabrication process; and outputting the statistical information as an evaluation of the fabrication process.
 2. The method of claim 1, further comprising automatically identifying one or more desired modifications to parameters of the fabrication process based upon the statistical information.
 3. The method of claim 1, wherein the first of the inspection regions is in a different shot from the other inspection regions.
 4. The method of claim 1, the step of determining comprising comparing locations of the edges with associated edges of line segments and curves of the reference pattern to generate the plurality of measurements.
 5. The method of claim 1, the step of processing comprising processing the statistical information for all inspection regions to form statistical information associated with the wafer.
 6. The method of claim 1, further comprising selecting two or more shots of the wafer for analysis, wherein the inspection regions are located within the selected shots.
 7. The method of claim 6, wherein the inspection regions are within one or more dies formed within each of the selected shots.
 8. The method of claim 6, the step of processing comprising, for each of the selected shots, processing the measurements for inspection regions within the shot to form the statistical information associated with the shot.
 9. The method of claim 8, further comprising analyzing the statistical information associated with each of the selected shots to determine fabrication process variation across the wafer.
 10. The method of claim 6, the step of processing comprising processing, for each inspection region within each of the selected shots, the measurements to form the statistical information associated with the inspection region.
 11. The method of claim 10, further comprising analyzing the statistical information associated with the inspection regions to determine fabrication process variation within each of the selected shots.
 12. The method of claim 1, the step of processing comprising processing the measurements for the selected patterns for each inspection regions to form the statistical information.
 13. The method of claim 1, the step of selecting one or more patterns comprising selecting patterns based upon a range of design data measurements associated with the patterns.
 14. The method of claim 1, further comprising, prior to the step of processing, selecting measurements for line widths based upon direction of lines formed by the edges, the step of processing comprising processing the selected measurements.
 15. The method of claim 14, the step of selecting comprising selecting measurements for one or more of the directions of horizontal, vertical and diagonal, the step of outputting comprising outputting the statistical information for each of the directions.
 16. The method of claim 1, the step of selecting one or more inspection regions comprising selecting the one or more inspection regions based upon known susceptibilities of patterns to variation in the fabrication process.
 17. The method of claim 1, the step of selecting one or more inspection regions comprising selecting the two or more inspection regions to be equally spaced within at least one shot formed on the wafer.
 18. The method of claim 17, the step of selecting one or more inspection regions comprising selecting at least five inspection regions within each of at least five shots formed on the wafer.
 19. The method of claim 1, the step of determining the one or more measurements comprising determining at least one of (a) a width of the pattern, (b) a maximum circle that fits within a boundary of the pattern, and (c) a smallest enclosing rectangle of the boundary of the pattern.
 20. The method of claim 1, the step of processing comprising classifying the measurements based upon design data associated with the measured pattern.
 21. The method of claim 20, wherein the measured pattern is classified, using the design data associated with the measured pattern, based upon one or more of: a direction of the measured pattern within the design data, a width of the pattern within the design data, a spacing of the measured pattern from adjacent patterns within the design data, a type of a gate represented by the pattern within the design data, a density of neighboring patterns, and information in the design data associated with one or more patterns neighboring the measured pattern.
 22. The method of claim 21, the information within the design data associated with the one or more neighboring patterns including one or more of: a pattern width, an adjacent space, and a pattern density.
 23. The method of claim 1, the step of processing comprising determining differences between the measurements and associated values of the design data.
 24. The method of claim 1, the statistical information comprising at least one of a standard deviation, a maximum value, and a minimum value.
 25. The method of claim 1, wherein each of the inspection regions has sides of 1 micrometer (μm) or greater in length.
 26. The method of claim 1, the step of processing comprising classifying the measurements based upon similarity in shape and size of design data associated with the measured patterns.
 27. The method of claim 26, wherein the similarity in shape and size are determined by aligning and distancing sides of one or both of (a) the design data and (b) simulation data obtained by simulating the design data associated with the measured patterns.
 28. An inspection apparatus for evaluating a fabrication process used to form patterns on a wafer, comprising: an imager for capturing at least one image of each of a plurality of selected inspection regions on the wafer; a reference pattern generator for generating a reference pattern for each of the selected inspection regions based upon design data of the patterns formed within the inspection regions, the reference pattern being represented by one or both of (a) one or more line segments and (b) one or more curves; an inspection unit for: selecting the plurality of inspection regions; automatically selecting at least one pattern within each inspection region based upon tendency for measurement variation resulting from variation in the fabrication process; detecting edges within the at least one image; and comparing certain of the edges with associated line segments and curves of the reference pattern to generate one or more measurements; and a statistical analyzer for processing the measurements to form statistical information associated with the fabrication process; and an output unit for outputting the statistical information as an evaluation of the fabrication process.
 29. The inspection apparatus of claim 28, the output unit indicating one or more modifications to parameters of the fabrication process based upon the statistical information.
 30. The inspection apparatus of claim 28, the inspection unit selecting at least five inspection regions within each of five shots of the wafer.
 31. The inspection apparatus of claim 28, the inspection unit selecting at least twenty-one inspection regions within at least one shot of the wafer.
 32. The inspection apparatus of claim 28, the inspection unit forming each measurement by determining, based upon the detected edges, at least one of (a) a width of selected patterns, (b) spacing between selected patterns and adjacent patterns, (c) a maximum empty circle within detected edges of the pattern, and (d) a smallest enclosing rectangle containing edges of the pattern.
 33. The inspection apparatus of claim 32, the statistical analyzer classifying the measurements based upon one or more of a direction of the selected patterns within the design data, a design width of the selected patterns within the design data, a space between the selected pattern and adjacent patterns within the design data, a type of a gate formed by the selected patterns in the design data, and information of one or more patterns neighboring the selected patterns within the design data.
 34. The inspection apparatus of claim 33, the statistical analyzer determining, as information of neighboring patterns, at least one of: a neighboring pattern width, a neighboring space width, and a density of neighboring patterns.
 35. The inspection apparatus of claim 28, the inspection unit, in forming the statistical information, calculating differences between the measurements and associated values derived from the design data.
 36. The inspection apparatus of claim 28, the statistical information comprising at least one of an average, a standard deviation, a maximum value, and a minimum value.
 37. The inspection apparatus of claim 28, the inspection unit selecting each inspection regions as one of: a shot of the wafer, a die of the wafer, a portion of a shot of the wafer, and a portion of a die of the wafer.
 38. The inspection apparatus of claim 37, wherein each of the inspection regions has sides of 1 micrometer (μm) or greater in length.
 39. The inspection apparatus of claim 28, the inspection unit determining, for selected patterns within the inspection region, one or more measurements based upon one or both of (a) a maximum empty circle within the boundary of the imaged pattern and (b) a smallest enclosing rectangle that includes the boundary of the imaged pattern.
 40. The inspection apparatus of claim 28, the statistical analyzer classifying the statistical information based upon similarity of one or both of design data for imaged patterns and simulation data of the imaged patterns.
 41. The inspection apparatus of claim 28, the imager being a scanning electron microscope based imager.
 42. An inspection apparatus for inspecting patterns formed on a wafer by using an image of said patterns and data for fabricating said patterns, comprising: an imager for capturing at least one image of each of a plurality of inspection regions on the wafer; a reference pattern generator for generating a reference pattern for each of the inspection regions from design data of the wafer, the reference pattern being formed of one or both of (a) one or more line segments and (b) one or more curves; and an inspection unit for: detecting edges within each of the images; automatically selecting patterns within each of the inspection regions based upon tendency for measurement variation resulting from variation in the fabrication process; comparing, for the selected patterns, certain of the edges with associated line segments and curves of the reference pattern to determine one or both of (a) a maximum empty circle within the boundary of the certain edges and (b) a smallest enclosing rectangle that includes the certain edges; and generating defect information based upon one or both of the maximum empty circle and the smallest enclosing rectangle.
 43. The inspection apparatus of claim 42, wherein the evaluation patterns are selected from the group consisting of contact hole, and via.
 44. An inspection apparatus for evaluating defects in patterns fabricated on a wafer by a fabrication process, comprising: an imager for capturing at least one image of each of at least one inspection region on the wafer; a reference pattern generator for generating a reference pattern for each of the inspection regions from design data of the patterns, the reference pattern being formed of one or both of (a) one or more line segments and (b) one or more curves; an inspection unit for: detecting edges within the image; comparing certain of the edges with associated line segments and curves of the reference pattern to determine the defects; applying, within the design data and centered on the location of each of the defects, a windowing region to select a windowed pattern associated with the defect; comparing, for each of the defects, the windowed pattern associated with the defect against each windowed pattern associated with the other defects to determine a difference value for each pair of defects; and grouping defects having difference values less than a predefined difference value threshold; and an output unit for outputting information of grouped defects.
 45. A method for evaluating a fabrication process of a wafer, comprising: determining measurements W_(Ei) of patterns formed on the wafer prior to the fabrication process; determining measurements W_(Ri) of the patterns after the fabrication process; subtracting measurements W_(Ei) from measurements W_(Ri) to form difference measurements; and statistically analyzing the difference measurements to evaluate the fabrication process.
 46. The method of claim 45, the patterns being selected at the same position within each of a plurality of shots of the wafer.
 47. The method of claim 45, the patterns being selected at the same position within each of a plurality of dies of the wafer.
 48. A method for evaluating a fabrication process of a wafer, comprising: determining measurements W_(Ai) of the patterns formed on the wafer after the fabrication process; determining measurements W_(Gi) of patterns formed on a known good wafer by a substantially similar process to the fabrication process; subtracting measurements W_(Ai) from measurements W_(Gi) to form difference measurements; and statistically analyzing the difference measurements to evaluate the fabrication process.
 49. The method of claim 48, the patterns being selected at the same position within each of a plurality of shots of the wafer.
 50. The method of claim 48, the patterns being selected at the same position within each of a plurality of dies of the wafer. 